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Easy operator touch screen interface
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Configurable for dry to dry processing
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FOUP Load port options
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Multitasking feature for high throughput
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Capable of processing cassettes of 800mm substrates
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Real time process viewing/tracking
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Historical data storage
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Friendly recipe editor
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Administrator control screens
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Programmable security levels
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Full function maintenance controls
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Unlimited programmable recipes
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Can accept and pass cassettes to other
equipment
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SECS-GEM communication capabilities
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Meets 3rd. party electrical inspection
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CE and Semi S2 certificates available
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FMGlobal 4910 material options
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Optional fire suppression system
